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International Journal of High-Energy Physics

Product details

Cryofox Cluster UHV or HV - fully automtic with up to 5 process chambers May 29, 2015

Cryofox Cluster is developed for PVD and PECVD processes in UHV or HV environment. It is optimized in the mechanical design and control system for highest output of quality research results.

The Cryofox UHV or HV Cluster System is a family of compact cluster tools, specific developed for PVD and PECVD processes in UHV or HV environment.

Major application fields are:
- Thin Film Solar
- OLED structures
- Fuel Cell Battery

The systems can be configured with chambers for a wide range of process as:
- Sputtering, DC, RF, HIPIMS, Bipolar
- Sputtering, reactive and non-reactive
- Knudsen cells for OLED deposition
- Thermal evaporation sources
- PECVD deposition
- Thermal pre- and post- processing
- Laser post processing

The standard main transfer chamber is equipped with six ports, allowing up to five process chambers and one load lock chamber.

 

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