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Triple Filter Quadrupole Mass Spectrometers for Precision Gas Analysis

Hiden HAL 3F mass spectrometers for high precision scientific, process applications and UHV applications.

HAL 3F Mass Spectrometers. Applications Include:
-Surface Science
-Molecular Beam Studies
-UHV Temperature Programmed Desorption
-High Performance RGA
-Cluster Studies
-Leak Detection/Virtual Leaks
-Desorption/Outgassing studies/Bakeout cycles
-Chamber / Process gas Contaminants

-High Sensitivity, enhanced detection from 100% to 5ppb
-Mass range options to 2500 amu with Automatic mass scale alignment
-Enhanced long-term Stability (<±0.5% height variation over 24h)
-Ion source control for soft ionisation & appearance potential mass spectrometry
-Enhanced sensitivity for high mass transmission, 6,9,12mm pole dia. options
-Available with a wide choice of integral ioniser configurations, e.g. low profile, XBS
-Enhanced contamination resistance via the RF-only pre-filter stage


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