This site uses cookies. By continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and Cookies policy.
Skip to the content

International Journal of High-Energy Physics

Product details

EQP – Mass and Energy Analyser for Plasma Diagnostics Jan 31, 2018

Company details

Hiden Analytical Limited
420 Europa Boulevard
United Kingdom

Tel: +44 1925 445 225
Fax: +44 1925 416 518

The Hiden EQP is a combined Mass/Energy analyser for the analysis of positive AND negative ions, neutrals, and radicals from plasma processes

Complete energy resolved mass speciation & resolved energy analysis of all species in your plasma:
-+ve ions, -ve Ions, Neutral Radicals & Analysis
-Etching/Deposition Studies
-Ion implantation/Laser Ablation
-Residual Gas Analysis/Leak Detection
-Plasma electrode coupling-follow electrode conditions during operation
-Analysis through a viewport, grounded electrode, driven electrode

-Software controlled Ion Extraction Optics for min.plasma perturbation
-45° Electrostatic Sector analyser, Scan Energy at 0.05eV increments/0.25eV FWHM
-Minimum perturbation of ion flight path & constant ion transmission - all energies
-Differentially pumped Triple filter Quadrupole, mass range options to 2500amu
-High Sensitivity/Stability Pulse Ion Counting Detector with 7 decade dynamic range


More products from this company