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International Journal of High-Energy Physics

Product details

EQP – Mass and Energy Analyser for Plasma Diagnostics Jan 31, 2018

The Hiden EQP is a combined Mass/Energy analyser for the analysis of positive AND negative ions, neutrals, and radicals from plasma processes

Complete energy resolved mass speciation & resolved energy analysis of all species in your plasma:
-+ve ions, -ve Ions, Neutral Radicals & Analysis
-Etching/Deposition Studies
-Ion implantation/Laser Ablation
-Residual Gas Analysis/Leak Detection
-Plasma electrode coupling-follow electrode conditions during operation
-Analysis through a viewport, grounded electrode, driven electrode

Features:
-Software controlled Ion Extraction Optics for min.plasma perturbation
-45° Electrostatic Sector analyser, Scan Energy at 0.05eV increments/0.25eV FWHM
-Minimum perturbation of ion flight path & constant ion transmission - all energies
-Differentially pumped Triple filter Quadrupole, mass range options to 2500amu
-High Sensitivity/Stability Pulse Ion Counting Detector with 7 decade dynamic range

 

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